18 March 2015 Modeling and simulation of the beam steering unit
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Production lithography is undergoing a technology shift, and the requirements of beam delivery system (BDS) are increasing which also raises the precision requirements of the beam steering units (BSU) in BDS. In essence, the BSU is a two rotational degree of freedom platform. In this paper, a BSU based on 3-RPS flexure parallel mechanism is proposed. By analyzing the relationship between the unit’s dimensions and mechanics, a mathematical model is built. Then the BSU with a balance between lower stress of the flexure hinges and higher accuracy of the unit can be got by optimizing the dimensions with the mathematical model. Finally a simulation is conducted to verify the design.
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Jiayun Feng, Jiayun Feng, Xiaoping Li, Xiaoping Li, Xin He, Xin He, Jinchun Wang, Jinchun Wang, } "Modeling and simulation of the beam steering unit", Proc. SPIE 9426, Optical Microlithography XXVIII, 942623 (18 March 2015); doi: 10.1117/12.2084588; https://doi.org/10.1117/12.2084588


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