26 March 2015 Enabling CoO improvement thru green initiatives
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Abstract
Chipmakers continued pressure to drive down costs while increasing utilization requires development in all areas. Cymer’s commitment to meeting customer’s needs includes developing solutions that enable higher productivity as well as lowering cost of lightsource operation. Improvements in system power efficiency and predictability were deployed to chipmakers’ in 2014 with release of our latest Master Oscillating gas chamber. In addition, Cymer has committed to reduced gas usage, completing development in methods to reduce Helium gas usage while maintaining superior bandwidth and wavelength stability. The latest developments in lowering cost of operations are paired with our advanced ETC controller in Cymer’s XLR 700ix product.
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Eric Gross, Eric Gross, G. G. Padmabandu, G. G. Padmabandu, Richard Ujazdowski, Richard Ujazdowski, Don Haran, Don Haran, Matt Lake, Matt Lake, Eric Mason, Eric Mason, Walter Gillespie, Walter Gillespie, } "Enabling CoO improvement thru green initiatives", Proc. SPIE 9426, Optical Microlithography XXVIII, 942626 (26 March 2015); doi: 10.1117/12.2086283; https://doi.org/10.1117/12.2086283
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