PROCEEDINGS VOLUME 9427
SPIE ADVANCED LITHOGRAPHY | 22-26 FEBRUARY 2015
Design-Process-Technology Co-optimization for Manufacturability IX
Editor Affiliations +
Proceedings Volume 9427 is from: Logo
SPIE ADVANCED LITHOGRAPHY
22-26 February 2015
San Jose, California, United States
Front Matter: Volume 9427
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942701 (2015) https://doi.org/10.1117/12.2193828
Invited Session I
Lars Liebmann, Albert Chu, Paul Gutwin
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942702 (2015) https://doi.org/10.1117/12.2175509
Layout Patterns Applications
Jinho Park, NamJae Kim, Jae-hyun Kang, Seung Weon Paek, Steve Kwon, Marwah Shafee, Kareem Madkour, Wael ElManhawy, Joe Kwan, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942703 (2015) https://doi.org/10.1117/12.2087473
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942704 (2015) https://doi.org/10.1117/12.2085955
Jean-Christophe Le Denmat, Nelly Feldman, Olivia Riewer, Emek Yesilada, Michel Vallet, Christophe Suzor, Salvatore Talluto
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942705 (2015) https://doi.org/10.1117/12.2085307
Sandeep Kumar Dey, Panagiotis Cheilaris, Nathalie Casati, Maria Gabrani, Evanthia Papadopoulo
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942706 (2015) https://doi.org/10.1117/12.2085547
Multipatterning
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942707 (2015) https://doi.org/10.1117/12.2085918
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942708 (2015) https://doi.org/10.1117/12.2085705
W. Gillijns, S. M. Y. Sherazi, D. Trivkovic, B. Chava, B. Vandewalle, V. Gerousis, P. Raghavan, J. Ryckaert, K. Mercha, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942709 (2015) https://doi.org/10.1117/12.2085923
Nagaraj Chary Samboju, Soo-Han Choi, Srini Arikati, Erdem Cilingir
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270A (2015) https://doi.org/10.1117/12.2085834
Yukihide Kohira, Chikaaki Kodama, Tomomi Matsui, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270B (2015) https://doi.org/10.1117/12.2085285
Invited Session II
Julien Ryckaert, Praveen Raghavan, Pieter Schuddinck, Huynh Bao Trong, Arindam Mallik, Sushil S. Sakhare, Bharani Chava, Yasser Sherazi, Philippe Leray, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270C (2015) https://doi.org/10.1117/12.2178997
Layout Optimization and Verification I
Jinhyuck Jun, Minwoo Park, Chanha Park, Hyunjo Yang, Donggyu Yim, Munhoe Do, Dongchan Lee, Taehoon Kim, Junghoe Choi, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270D (2015) https://doi.org/10.1117/12.2085460
Bharani Chava, David Rio, Yasser Sherazi, Darko Trivkovic, Werner Gillijns, Peter Debacker, Praveen Raghavan, Ahmad Elsaid, Mircea Dusa, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270E (2015) https://doi.org/10.1117/12.2085739
Helen Li, Mealie Zhang, Waisum Wong, Huiyuan Song, Wei Xu, Philippe Hurat, Hua Ding, Yifan Zhang, Michel Cote, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270F (2015) https://doi.org/10.1117/12.2087443
Hongyi Liu, Jun Zhou, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270G (2015) https://doi.org/10.1117/12.2085738
Design Interaction with Metrology: Joint Session with Conferences 9424 and 9427
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270H (2015) https://doi.org/10.1117/12.2086368
DFM (Design and Litho Optimization): Joint Session with Conferences 9426 and 9427
Heon Choi, Wei-long Wang, Chidam Kallingal
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270I (2015) https://doi.org/10.1117/12.2087111
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270J (2015) https://doi.org/10.1117/12.2085770
Masashi Tawada, Takaki Hashimoto, Keishi Sakanushi, Shigeki Nojima, Toshiya Kotani, Masao Yanagisawa, Nozomu Togawa
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270K (2015) https://doi.org/10.1117/12.2087007
Circuit Variability
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270M (2015) https://doi.org/10.1117/12.2085844
Sushil Sakhare, Darko Trivkovic, Tom Mountsier, Min-Soo Kim, Dan Mocuta, Julien Ryckaert, Abdelkarim Mercha, Diederik Verkest, Aaron Thean, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270O (2015) https://doi.org/10.1117/12.2086100
DSA Design for Manufacturability: Joint Session with Conferences 9423, 9426, and 9427
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270P (2015) https://doi.org/10.1117/12.2084776
Layout and Optimization and Verification II
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270Q (2015) https://doi.org/10.1117/12.2086904
Rock Deng, Elain Zou, Sid Hong, Jinyan Wang, Yifan Zhang, Jason Sweis, Ya-Chieh Lai, Hua Ding, Jason Huang
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270R (2015) https://doi.org/10.1117/12.2087100
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270S (2015) https://doi.org/10.1117/12.2085790
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270T (2015) https://doi.org/10.1117/12.2086954
Poster Session
Ushasree Katakamsetty, Dinesh Koli, Sky Yeo, Colin Hui, Ruben G. Ghulghazaryan, Burak Aytuna, Jeff Wilson
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270U (2015) https://doi.org/10.1117/12.2085728
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270V (2015) https://doi.org/10.1117/12.2085733
Pu Wang, Chuyang Hong, Qi Cheng, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270W (2015) https://doi.org/10.1117/12.2085919
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270X (2015) https://doi.org/10.1117/12.2085956
ZeXi Deng, ChunShan Du, Lin Hong, LiGuo Zhang, JinYan Wang
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270Y (2015) https://doi.org/10.1117/12.2086041
Lalit Shokeen, Ayman Hamouda, Mark Terry, Dan J. Dechene, Stephen Hsu, Michael Crouse, Pengcheng Li, Keith Gronlund, Gary Zhang
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 94270Z (2015) https://doi.org/10.1117/12.2086101
Neal Lafferty, Jason Meiring, Mohamed Bahnas, Joseph O'Neill, Toshikazu Endo, Dan Schumacher, James Culp, Glenn Wawrzynski, Gurpreet Singh Lamba, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942710 (2015) https://doi.org/10.1117/12.2086355
Travis Lewis, Vijay Veeraraghavan, Kenneth Jantzen, Stephen Kim, Minyoung Park, Gordon Russell, Mark Simmons
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942711 (2015) https://doi.org/10.1117/12.2086927
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942712 (2015) https://doi.org/10.1117/12.2087078
Yonghyeon Kim, Kweonjae Lee, Jinman Chang, Taeheon Kim, Daehan Han, Kyusun Lee, Aeran Hong, Jinyoung Kang, Bumjin Choi, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942713 (2015) https://doi.org/10.1117/12.2085004
Jun Zhou, Hongyi Liu, Ting Han, Yijian Chen
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942714 (2015) https://doi.org/10.1117/12.2085898
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability IX, 942715 (2015) https://doi.org/10.1117/12.2185545
Back to Top