18 March 2015 Automatic DFM methodology for bit line pattern dummy
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Abstract
This paper presents an automated DFM solution to generate Bit Line Pattern Dummy (BLPD) for memory chips. Dummy shapes are aligned with memory functional bits lines to ensure uniform and reliable memory device. This paper will present a smarter approach that uses an analysis based technique for adding the dummy fill shapes that have different types according to the space available. Experimental results based on layout of a memory test chip.
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Mohamed Bahr, "Automatic DFM methodology for bit line pattern dummy", Proc. SPIE 9427, Design-Process-Technology Co-optimization for Manufacturability IX, 942715 (18 March 2015); doi: 10.1117/12.2185545; https://doi.org/10.1117/12.2185545
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