2 April 2015 Aerosol deposited PZT actuated 2D scanner system
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Abstract
A new lead-zirconium-titanate (PZT) actuator design for a micro scanning illuminating device is being developed. The thin PZT film is deposited directly on stainless steel by using an aerosol deposition machine. The aerosol deposition method enables inexpensive, quick, room temperature fabrication while producing high quality PZT films. The presented scanners would be attractive for endoscopic device applications, where inexpensive systems with high resolution would be a move toward disposal endoscopes. The design of this scanning illuminator and fabrication method are presented. Measurements of the PZT layer surface roughness and the aerosol deposited PZT powder particle diameter are presented. Ongoing work and fabrication challenges are discussed.
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David R. Schipf, David R. Schipf, Chao-Ting Chen, Chao-Ting Chen, Chun-Liang Kuo, Chun-Liang Kuo, Kang-Yu Chu, Kang-Yu Chu, Wen-Jong Wu, Wen-Jong Wu, Wei-Chih Wang, Wei-Chih Wang, } "Aerosol deposited PZT actuated 2D scanner system", Proc. SPIE 9431, Active and Passive Smart Structures and Integrated Systems 2015, 94313D (2 April 2015); doi: 10.1117/12.2186333; https://doi.org/10.1117/12.2186333
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