|
|
|
The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from this book: Author(s), “Title of Paper,” in The International Conference on Micro- and Nano-Electronics 2014, edited by Alexander A. Orlikovsky, Proceedings of SPIE Vol. 9440 (SPIE, Bellingham, WA, 2014) Article CID Number. ISSN: 0277-786X ISBN: 9781628415551 Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2014, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/14/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library. Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:
The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. AuthorsNumbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Abramov, Igor I., 17 Antonenko, A. H., 0F, 0G Antonov, Andrey A., 19 Antonov, S. P., 0O Arzhanova, Natalia A., 10 Babich, Alexey V., 05 Baklanov, Mikhail R., 02 Balbekov, A., 1A Bantysh, B. I., 1H, 1I Belinsky, L. V., 1L Belov, Alexey N., 07, 0Z Bogdanov, Yuri I., 1H, 1I, 1J, 1K, 1L Bogdanova, N. A., 1J, 1K Borgardt, N. I., 0D, 0E Borzdov, A. V., 13 Borzdov, V. M., 13 Boyko, Anton N., 0U Bruk, M. A., 0J Chaplygin, Yuri A., 0O Cherkov, A. G., 0F Chernyaev, A. P., 16 Chernyavskiy, A. Yu., 1H, 1I Dagesyan, S. A., 0P Danilov, I. A., 1C Dedkova, A., 0D Denisenko, Mark A., 14 Divochiy, A., 1F Dolotov, Pavel S., 19 Dresvyannikov, Maxim A., 0S, 16 Dronov, A., 0H, 0I Drosdetsky, M. G., 1C Dubkov, S. V., 0D, 0E Elezov, M., 1F Emelianov, A., 0C Emeliyanov, V. V., 1B Fastovets, D. V., 1H Galimov, A. M., 1C Galkov, M. S., 0G Gavrilin, I., 0H Gavrilov, Sergey A., 07, 0B, 0I, 0Z Gismatulin, A. A., 0F Goltsman, G., 1F Gorbunov, Maxim S., 19, 1A Grishina, Y. S., 0D, 0E Gromov, Dmitry G., 06, 0D, 0E Holevo, A. S., 1H Isaeva, Alina S., 0V Iskakov, R., 03 Kalnov, V. A., 09, 0J Kamaev, G. N., 0F, 0G Karuzskii, Aleksandr L., 0S, 16 Kateev, Igor Yu., 1G Kelm, E. A., 0M, 0N Khorin, I., 09 Kirilenko, E., 0D Kochubey, S. A., 0G Kokin, A. A., 1D Kokin, V. A., 1D Kolomejtseva, N. V., 17 Konoplev, Boris G., 14 Korobova, N., 03 Kovalyuk, V., 1F Kovyrkin, Pavel B., 0U Kozyukhin, Sergey A., 05, 06 Krasnoborodko, S. Yu., 0O Kravtsova, V., 03 Krishtab, M., 02 Kudrya, V. P., 0K Kukhtyaeva, V. R., 08 Kurochkin, V., 1F Kurochkin, Y., 1F Labunov, Vladimir A., 17 Lazarenko, Petr I., 06 Lazzarino, F., 02 Lebedev, Anatoly A., 19, 1C Lisovsky, I. P., 0F Litovchenko, Vladimir G., 0F Lukichev, Vladimir F., 0L, 1H, 1I Maidanchuk, I. Yu., 0F Maishev, Yu. P., 0K Makarchuk, Vladimir, 0X Miakonkikh, Andrey V., 0L, 0Y Mikhailova, M. S., 08 Milovanov, R. A., 0M, 0N Mironov, Rostislav E., 05 Mityagin, Yu. A., 16 Molchanova, A., 04 Molodtsova, G., 0M, 0N Naumov, Victor V., 0W Neizvestniy, Igor G., 0F Nersesyan, Suren, 0R Nikolaev, V., 0A Ogryzko, Vasily, 1N Orlikovsky, Alexander A., 1G, 1H, 1I Orlikovsky, Nikolay A., 09, 1G Ozhegov, R., 1F Ozhigov, Yuri I., 1M, 1N Pavlova, L. M., 0E Perestoronin, Anatoly V., 0S, 16 Petrosyan, Stepan, 0R Petrov, V., 0A Petukhov, I. N., 08 Petukhov, V., 0C Popova, E., 0I Presnukhina, A., 0I Prikhodko, O., 03 Prokaznikov, Alexander V., 10 Prokaznikov, Michael A., 10 Pyatilova, O., 07, 0B Rakitin, A., 12 Rakitin, V., 12 Redichev, Evgeniy N., 06 Rezchikova, Elena V., 18 Rogozhin, Aleksander E., 04, 09, 0J, 0L Romanova, I. A., 17 Roschin, V. M., 08 Rozanov, R., 07 Rudakov, Valeriy I., 0L Rudenko, Konstantin V., 0L, 0Y Ryndin, Eugeny A., 0V, 14 Safronova, N. A., 0G Savitskiy, A. I., 0E Selyukov, Roman V., 0W Semenihin, I. A., 1H Semenikhin, Igor A., 15 Shahsenov, Izat S., 0Y Shakhnov, Vadim A., 18 Shalimov, Andrei S., 0U Sherchenkov, Alexey A., 05, 06 Shevchuk, S. L., 0K Shevyakov, Vasiliy I., 07, 0O, 0Z Shilyaeva, Yu. I., 08 Shnaider, Alexandra I., 19 Shtern, Maxim Y., 06 Shtern, Yuri I., 05 Skovoroda, Nikita A., 1M Smagulova, S. A., 0O Smirnov, K., 1F Soldatov, E. S., 0P Spirin, A. V., 0J Stepanov, A. S., 0P Streltsov, D. R., 0J Timoshenkov, Sergei P., 0U Timoshenkov, Sergey P., 06, 0A, 0B, 0C Trifonov, A. Y., 0E Tskhovrebov, Andrey M., 0S Tsukanov, Alexander V., 1G Turin, V. O., 1C Umersakova, M., 03 Useinov, R. G., 1B Uvarov, Ilya V., 0W Vachtomin, Y., 1F Vatuev, A. S., 1B Verstov, Vladimir, 0X Vertyanov, D., 0A Volchkov, N. A., 16 Volodin, V. A., 0F, 0G Vorobiev, Maksim I., 0Z V’yurkov, V. V., 13 Yesayan, Ashkhen, 0R Zanuccoli, Mauro, 15 Zebrev, Gennady I., 11, 19, 1B, 1C Zharik, G., 0P Zheleznyakova, A., 07, 0H, 0I Zherikhina, Larisa N., 0S Zhigalov, V., 0B, 0C Zhikharev, E. N., 0J Zhukov, Valery A., 0T Zinchenko, Lyudmila A., 0X, 18 Zobov, Vladimir Eu., 1E Zotovich, A., 02 Zubov, D. N., 0M, 0N Conference CommitteesConference Chair Conference Co-chairs
International Advisory Committee
Program Committee
Program Committee Members
Organizing Committee
Organizing Committee Members
Local Organizing Committee
Session Chairs
IntroductionThe volume contains selected papers presented at the International Conference “Micro- and Nano-Electronics 2014” (ICMNE-2014) which was held in Zvenigirod, Moscow Region, Russia 6–10 October 2014. ICMNE is a biannual conference covering the main fields of micro- and nano-electronic technologies and device physics. Since 1992, the Institute of Physics and Technology (Moscow, Russian Federation) has been the permanent organizer of ICMNE, and it became an SPIE-affiliated conference in 2003. ICMNE-2014 included an extended session, “Quantum Informatics 2014”. The ICMNE-2014 scope contained such scientific and technological fields as micro-and nano-electronic materials and films; technologies and equipment; metrology, physics and technologies of micro- and nano-devices; simulation and modeling; silicon-on-insulator and low-dimensional structures; and quantum informatics. ICM N E-2014 included three plenary sessions and 19 topical sessions focusing on the following areas:
The scientific program was based on invited and contributed papers from the scientists employed at European and Siberian Regions of Russia, Armenia, Belarus, Belgium, Germany, France, United States, and Japan. The invited lectures on the current achievements and challenges in the contemporary microelectronics were delivered by the scientists from France, Belgium, Germany, France, Japan, and Russia. The session contributions were made by academic institutions and universities, as well as from industry. About 100 contributions were oral presentations and about 80 were presented as posters. We hope these sessions resulted in helpful discussions at the session and between attendees will promote continuing research activity in the microelectronic community. Additional information about ICMNE-2014 can be found at the conference website http://www.icmne.ftian.ru Alexander A. Orlikovsky |
