22 December 2014 Front Matter: Volume 9440
Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 944001 (2014) https://doi.org/10.1117/12.2184083
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9440, including the Title Page, Copyright information, Table of Contents, Authors, Introduction (if any), and Conference Committee listing.

The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from this book:

Author(s), “Title of Paper,” in The International Conference on Micro- and Nano-Electronics 2014, edited by Alexander A. Orlikovsky, Proceedings of SPIE Vol. 9440 (SPIE, Bellingham, WA, 2014) Article CID Number.

ISSN: 0277-786X

ISBN: 9781628415551

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Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:

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  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start withd 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc.

The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages.

Authors

Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Abramov, Igor I., 17

Antonenko, A. H., 0F, 0G

Antonov, Andrey A., 19

Antonov, S. P., 0O

Arzhanova, Natalia A., 10

Babich, Alexey V., 05

Baklanov, Mikhail R., 02

Balbekov, A., 1A

Bantysh, B. I., 1H, 1I

Belinsky, L. V., 1L

Belov, Alexey N., 07, 0Z

Bogdanov, Yuri I., 1H, 1I, 1J, 1K, 1L

Bogdanova, N. A., 1J, 1K

Borgardt, N. I., 0D, 0E

Borzdov, A. V., 13

Borzdov, V. M., 13

Boyko, Anton N., 0U

Bruk, M. A., 0J

Chaplygin, Yuri A., 0O

Cherkov, A. G., 0F

Chernyaev, A. P., 16

Chernyavskiy, A. Yu., 1H, 1I

Dagesyan, S. A., 0P

Danilov, I. A., 1C

Dedkova, A., 0D

Denisenko, Mark A., 14

Divochiy, A., 1F

Dolotov, Pavel S., 19

Dresvyannikov, Maxim A., 0S, 16

Dronov, A., 0H, 0I

Drosdetsky, M. G., 1C

Dubkov, S. V., 0D, 0E

Elezov, M., 1F

Emelianov, A., 0C

Emeliyanov, V. V., 1B

Fastovets, D. V., 1H

Galimov, A. M., 1C

Galkov, M. S., 0G

Gavrilin, I., 0H

Gavrilov, Sergey A., 07, 0B, 0I, 0Z

Gismatulin, A. A., 0F

Goltsman, G., 1F

Gorbunov, Maxim S., 19, 1A

Grishina, Y. S., 0D, 0E

Gromov, Dmitry G., 06, 0D, 0E

Holevo, A. S., 1H

Isaeva, Alina S., 0V

Iskakov, R., 03

Kalnov, V. A., 09, 0J

Kamaev, G. N., 0F, 0G

Karuzskii, Aleksandr L., 0S, 16

Kateev, Igor Yu., 1G

Kelm, E. A., 0M, 0N

Khorin, I., 09

Kirilenko, E., 0D

Kochubey, S. A., 0G

Kokin, A. A., 1D

Kokin, V. A., 1D

Kolomejtseva, N. V., 17

Konoplev, Boris G., 14

Korobova, N., 03

Kovalyuk, V., 1F

Kovyrkin, Pavel B., 0U

Kozyukhin, Sergey A., 05, 06

Krasnoborodko, S. Yu., 0O

Kravtsova, V., 03

Krishtab, M., 02

Kudrya, V. P., 0K

Kukhtyaeva, V. R., 08

Kurochkin, V., 1F

Kurochkin, Y., 1F

Labunov, Vladimir A., 17

Lazarenko, Petr I., 06

Lazzarino, F., 02

Lebedev, Anatoly A., 19, 1C

Lisovsky, I. P., 0F

Litovchenko, Vladimir G., 0F

Lukichev, Vladimir F., 0L, 1H, 1I

Maidanchuk, I. Yu., 0F

Maishev, Yu. P., 0K

Makarchuk, Vladimir, 0X

Miakonkikh, Andrey V., 0L, 0Y

Mikhailova, M. S., 08

Milovanov, R. A., 0M, 0N

Mironov, Rostislav E., 05

Mityagin, Yu. A., 16

Molchanova, A., 04

Molodtsova, G., 0M, 0N

Naumov, Victor V., 0W

Neizvestniy, Igor G., 0F

Nersesyan, Suren, 0R

Nikolaev, V., 0A

Ogryzko, Vasily, 1N

Orlikovsky, Alexander A., 1G, 1H, 1I

Orlikovsky, Nikolay A., 09, 1G

Ozhegov, R., 1F

Ozhigov, Yuri I., 1M, 1N

Pavlova, L. M., 0E

Perestoronin, Anatoly V., 0S, 16

Petrosyan, Stepan, 0R

Petrov, V., 0A

Petukhov, I. N., 08

Petukhov, V., 0C

Popova, E., 0I

Presnukhina, A., 0I

Prikhodko, O., 03

Prokaznikov, Alexander V., 10

Prokaznikov, Michael A., 10

Pyatilova, O., 07, 0B

Rakitin, A., 12

Rakitin, V., 12

Redichev, Evgeniy N., 06

Rezchikova, Elena V., 18

Rogozhin, Aleksander E., 04, 09, 0J, 0L

Romanova, I. A., 17

Roschin, V. M., 08

Rozanov, R., 07

Rudakov, Valeriy I., 0L

Rudenko, Konstantin V., 0L, 0Y

Ryndin, Eugeny A., 0V, 14

Safronova, N. A., 0G

Savitskiy, A. I., 0E

Selyukov, Roman V., 0W

Semenihin, I. A., 1H

Semenikhin, Igor A., 15

Shahsenov, Izat S., 0Y

Shakhnov, Vadim A., 18

Shalimov, Andrei S., 0U

Sherchenkov, Alexey A., 05, 06

Shevchuk, S. L., 0K

Shevyakov, Vasiliy I., 07, 0O, 0Z

Shilyaeva, Yu. I., 08

Shnaider, Alexandra I., 19

Shtern, Maxim Y., 06

Shtern, Yuri I., 05

Skovoroda, Nikita A., 1M

Smagulova, S. A., 0O

Smirnov, K., 1F

Soldatov, E. S., 0P

Spirin, A. V., 0J

Stepanov, A. S., 0P

Streltsov, D. R., 0J

Timoshenkov, Sergei P., 0U

Timoshenkov, Sergey P., 06, 0A, 0B, 0C

Trifonov, A. Y., 0E

Tskhovrebov, Andrey M., 0S

Tsukanov, Alexander V., 1G

Turin, V. O., 1C

Umersakova, M., 03

Useinov, R. G., 1B

Uvarov, Ilya V., 0W

Vachtomin, Y., 1F

Vatuev, A. S., 1B

Verstov, Vladimir, 0X

Vertyanov, D., 0A

Volchkov, N. A., 16

Volodin, V. A., 0F, 0G

Vorobiev, Maksim I., 0Z

V’yurkov, V. V., 13

Yesayan, Ashkhen, 0R

Zanuccoli, Mauro, 15

Zebrev, Gennady I., 11, 19, 1B, 1C

Zharik, G., 0P

Zheleznyakova, A., 07, 0H, 0I

Zherikhina, Larisa N., 0S

Zhigalov, V., 0B, 0C

Zhikharev, E. N., 0J

Zhukov, Valery A., 0T

Zinchenko, Lyudmila A., 0X, 18

Zobov, Vladimir Eu., 1E

Zotovich, A., 02

Zubov, D. N., 0M, 0N

Conference Committees

Conference Chair

  • Evgeny P. Velikhov, Russian Scientific Center “Kurchatov Institute” (Russian Federation)

Conference Co-chairs

  • Alexander A. Orlikovsky, Institute of Physics and Technology (Russian Federation)

  • Gennadiy Ya. Krasnikov, JSC Mikron, Zelenograd (Russian Federation)

International Advisory Committee

  • Alexander L. Aseev, Institute of Semiconductor Physics (Russian Federation)

  • Dmitri V. Averin, Stony Brook University (United States)

  • Mikhail R. Baklanov, International Microelectronic Center (Belgium)

  • Rupert Chabicovsky, Technical University, Vienna (Austria)

  • Yuri V. Gulyaev, Kotel’nikov Institute of Radioengineering and Electronics (Russian Federation)

  • Huey-Liang Hwang, National Tsing Hua University (Taiwan)

  • Vladimir A. Labunov, Belarusian State University of Informatics and Radioelectronics (Belarus)

  • Konstantin K. Likharev, Stony Brook University (United States)

  • Vladimir G. Litovchenko, Institute of Semiconductor Physics, NASU (Ukraine)

  • Jun-ichi Nishizawa, Semiconductor Research Institute (Japan)

  • Konstantin S. Novoselov, University of Manchester (United Kingdom)

  • Juras Požela, Semiconductor Physics Institute (Lithuania)

  • Iwo W. Rangelow, University of Ilmenau (Germany)

  • Heiner Ryssel, Fraunhofer Institute of Integrated Systems and Devices Technology (Germany)

  • Thomas Skotnicki, ST Microelectronics (France)

  • Robert A. Suris, Ioffe Physical-Technical Institute (Russian Federation)

  • Dorel Toma, Tokyo Electron Corporation, U.S. Technology Development Center (United States)

  • Akira Toriumi, University of Tokyo (Japan)

Program Committee

  • Alexander A. Orlikovsky, Chair, Institute of Physics and Technology (Russian Federation)

  • Igor G. Neizvestnyi, Co-chair, Institute of Semiconductor Physics (Russian Federation)

  • Vladimir F. Lukichev, Co-chair, Institute of Physics and Technology (Russian Federation)

Program Committee Members

  • Andrey F. Alexandrov, Lomonosov Moscow State University (Russian Federation)

  • Vitaliy V. Aristov, Institute of Microelectronics Technology and High-Purity Materials (Russian Federation)

  • Vladimir B. Betelin, Scientific Research Institute for System Analysis (Russian Federation)

  • Yuri I. Bogdanov, Institute of Physics and Technology (Russian Federation)

  • Yuri A. Chaplygin, National Research University of Electronic Technology (Russian Federation)

  • Boris G. Gribov, Scientific Research Institute on Especially Pure Materials (Russian Federation)

  • Fadey F. Komarov, Belarusian State University (Belarus)

  • Peter S. Kop’ev, Ioffe Physical-Technical Institute (Russian Federation)

  • Peter P. Maltsev, Institute on Ultra High Frequency Semiconductor Electronics (Russian Federation)

  • Alexey N. Nazarov, Institute of Semiconductor Physics, NASU (Ukraine)

  • Yuri I. Ozhigov, Lomonosov Moscow State University (Russian Federation)

  • Vladislav Ya. Panchenko, Institute on Laser and Informatics Technologies (Russian Federation)

  • Alexander S. Rudy, Yaroslavl Demidov State University (Russian Federation)

  • Nikolay N. Salaschenko, Institute for Physics of Microstructures (Russian Federation)

  • Kev M. Salikhov, Zavoisky Physical-Technical Institute (Russian Federation)

  • Alexander S. Sigov, Moscow State Technical University of Radioengineering, Electronics, and Automation (Russian Federation)

  • Pavel A. Todua, Moscow Institute of Physics and Technology (Russian Federation)

  • Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation)

Organizing Committee

  • Vladimir F. Lukichev, Chair, Institute of Physics and Technology (Russian Federation)

  • Konstantin V. Rudenko, Co-chair, Institute of Physics and Technology (Russian Federation)

Organizing Committee Members

  • Igor I. Abramov, Belarusian State University of Informatics and Radioelectronics (Belarus)

  • Ildar I. Amirov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation)

  • Yuri I. Bogdanov, Institute of Physics and Technology (Russian Federation)

  • Anastas A. Buharaev, Zavoisky Physical-Technical Institute (Russian Federation)

  • Mikhail A. Chuev, Institute of Physics and Technology (Russian Federation)

  • Alexander A. Gorbazevitch, Lebedev Physical Institute (Russian Federation)

  • Eugeny S. Gornev, JSC Mikron, Zelenograd (Russian Federation)

  • Mikhail A. Korolev, National Research University of Electronic Technology (Russian Federation)

  • Sergey A. Nikitov, Kotel’nikov Institute of Radioengineering and Electronics (Russian Federation)

  • Oleg P. Pchelyakov, Institute of Semiconductor Physics (Russian Federation)

  • Vladislav Yu. Rubaev, NIX Company (Russian Federation)

Local Organizing Committee

  • Vladimir F. Lukichev, Chair of the ICMNE-2014 Organizing Committee

  • Yuri I. Bogdanov, Chair of the Extended Session QI-2014

  • Vladimir P. Kudrya, Scientific Secretary of ICMNE-2014

  • Sergey I. Skalkin, Financial Director of ICMNE-2014

  • Alexander N. Astakhov, Administrator of ICMNE-2014

  • Alexey M. Dianov, PR-support of ICMNE-2014

  • Andrey Yu. Chernyavskiy

  • Andrey V. Miakonkikh

  • Alexander E. Rogozhin

  • Igor A. Semenikhin

  • Alexander V. Tsukanov

  • Vladimir V. Vyurkov

  • Lidiya M. Besschastnova

  • Irina Yu. Lukianova

  • Irina Novojilova

Session Chairs

  • Plenary Session I

    Vladimir F. Lukichev, Institute of Physics and Technology (Russian Federation)

  • Plenary Session II. Quantum Informatics I

    Yuri I. Bogdanov, Institute of Physics and Technology (Russian Federation)

  • Plenary Session III

    Vladimir F. Lukichev, Institute of Physics and Technology (Russian Federation)

  • 1 Materials and Films I

    Andrey V. Miakonkikh, Institute of Physics and Technology (Russian Federation)

  • 2 Physics and Technology of Micro- and Nanodevices I

    Eugeny Danilkin, Crocus Nanoelectronics (Russian Federation)

  • 3 Quantum Informatics II

    Sergey P. Kulik, Lomonosov Moscow State University (Russian Federation)

  • 4 Materials and Films II

    Konstantin V. Rudenko, Institute of Physics and Technology (Russian Federation)

  • 5 Physics and Technology of Micro- and Nanodevices II

    Vladimir F. Lukichev, Institute of Physics and Technology (Russian Federation)

  • 6 Silicon-on-Insulator and Low-Dimensional Structures

    Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation)

  • 7 Materials and Films III

    Ildar I. Amirov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation)

  • 8 Physics and Technology of Micro- and Nanodevices III

    Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation)

  • 9 Quantum Informatics III

    Vladimir Eu. Zobov, Kirensky Institute of Physics (Russian Federation)

  • 10 Materials and Films IV

    Konstantin V. Rudenko, Institute of Physics and Technology (Russian Federation)

  • 11 Meeting of the International Association of the Academies of Sciences

    Alexander A. Orlikovsky, Institute of Physics and Technology (Russian Federation)

  • 12 Quantum Informatics IV

    Sergey A. Moiseev, Kazan Physical-Technical Institute (Russian Federation)

  • 13 Simulation and Modeling I

    Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation)

  • 14 Micro- and Nanoelectronics Technologies and Equipment

    Alexander E. Rogozhin, Institute of Physics and Technology (Russian Federation)

  • 15 Quantum Informatics V

    Eduard B. Fel’dman, Institute of Problems of Chemical Physics (Russian Federation)

  • 16 Simulation and Modeling II

    Boris G. Konoplev, Institute of Nanotechnology, Electronics and Electronic Equipment Engineering of Southern Federal University (Russian Federation)

  • 17 Metrology and Characterization

    Andrey V. Miakonkikh, Institute of Physics and Technology (Russian Federation)

  • 18 Quantum Informatics VI

    Farid M. Ablayev, Institute for Informatics (Russian Federation)

  • 19 Simulation and Modeling III

    Mikhail A. Chuev, Institute of Physics and Technology (Russian Federation)

Introduction

The volume contains selected papers presented at the International Conference “Micro- and Nano-Electronics 2014” (ICMNE-2014) which was held in Zvenigirod, Moscow Region, Russia 6–10 October 2014. ICMNE is a biannual conference covering the main fields of micro- and nano-electronic technologies and device physics. Since 1992, the Institute of Physics and Technology (Moscow, Russian Federation) has been the permanent organizer of ICMNE, and it became an SPIE-affiliated conference in 2003.

ICMNE-2014 included an extended session, “Quantum Informatics 2014”. The ICMNE-2014 scope contained such scientific and technological fields as micro-and nano-electronic materials and films; technologies and equipment; metrology, physics and technologies of micro- and nano-devices; simulation and modeling; silicon-on-insulator and low-dimensional structures; and quantum informatics. ICM N E-2014 included three plenary sessions and 19 topical sessions focusing on the following areas:

  • Physics and Technology of Micro- and Nano-Devices

  • Materials and Films

  • Quantum Informatics

  • Silicon-on-Insulator and Low-Dimensional Structures

  • Simulation and Modeling

  • Micro- and Nano-Electronics Technologies and Equipment

  • Metrology and Characterization

  • Superconducting Structures and Devices

The scientific program was based on invited and contributed papers from the scientists employed at European and Siberian Regions of Russia, Armenia, Belarus, Belgium, Germany, France, United States, and Japan. The invited lectures on the current achievements and challenges in the contemporary microelectronics were delivered by the scientists from France, Belgium, Germany, France, Japan, and Russia. The session contributions were made by academic institutions and universities, as well as from industry. About 100 contributions were oral presentations and about 80 were presented as posters.

We hope these sessions resulted in helpful discussions at the session and between attendees will promote continuing research activity in the microelectronic community. Additional information about ICMNE-2014 can be found at the conference website http://www.icmne.ftian.ru

Alexander A. Orlikovsky

© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
} "Front Matter: Volume 9440", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 944001 (22 December 2014); doi: 10.1117/12.2184083; https://doi.org/10.1117/12.2184083
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