5 December 2014 White-light interferometry with high measurement speed
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Proceedings Volume 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 944115 (2014) https://doi.org/10.1117/12.2084973
Event: XIX Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2014, Jelenia Gora, Poland
Abstract
White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.
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Pavel Pavliček, Pavel Pavliček, Vojtěch Svak, Vojtěch Svak, } "White-light interferometry with high measurement speed ", Proc. SPIE 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 944115 (5 December 2014); doi: 10.1117/12.2084973; https://doi.org/10.1117/12.2084973
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