5 December 2014 Optical methods for the measurement of the shape of objects and their measurement uncertainty
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Proceedings Volume 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 94411K (2014) https://doi.org/10.1117/12.2084971
Event: XIX Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2014, Jelenia Gora, Poland
Abstract
There are various optical methods for the measurement of the geometrical shape of objects. We calculate the measurement uncertainty for several “paradigm” methods, by means of the Cramér - Rao lower bound. Thus the parameters, on which the measurement uncertainty depends, can be found. Substantial features of individual optical measurement methods (geometrical arrangement, optically smooth or rough surface, used light, dominant source of noise) of various measurement methods are compared and their influence on the measurement uncertainty is discussed.
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Pavel Pavliček, "Optical methods for the measurement of the shape of objects and their measurement uncertainty", Proc. SPIE 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 94411K (5 December 2014); doi: 10.1117/12.2084971; https://doi.org/10.1117/12.2084971
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