Preparation of coatings with low roughness by high-current impulse magnetron discharge

Andrey V. Kaziev; Ivan A. Shchelkanov; Georgy V. Khodachenko

doi:10.1117/12.2086913

7 January 2015 Preparation of coatings with low roughness by high-current impulse magnetron discharge

Andrey V. Kaziev, Ivan A. Shchelkanov, Georgy V. Khodachenko

Proceedings Volume 9442, Optics and Measurement Conference 2014; 94420J (2015) https://doi.org/10.1117/12.2086913
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

The contribution reports the experimental results of preparation of thin metal films (nickel, aluminum) with low surface roughness using high-current impulse magnetron discharge plasma. The coatings were deposited on silica and silicon surfaces. It was found that by applying a certain negative bias voltage to the substrate, one can stimulate the smoothing of the surface topology. For the case of nickel deposition the average surface roughness decreased from about 8 nm to about 2 nm. The discussion of experimental data acquired under different deposition conditions is presented. The results allow us to single out the main factors influencing the surface roughness of the films and to suggest an analytical condition for smoothing process.

Citation Download Citation

Andrey V. Kaziev, Ivan A. Shchelkanov, and Georgy V. Khodachenko "Preparation of coatings with low roughness by high-current impulse magnetron discharge", Proc. SPIE 9442, Optics and Measurement Conference 2014, 94420J (7 January 2015); https://doi.org/10.1117/12.2086913

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