7 January 2015 Advanced interferometry systems for dimensional measurement in nanometrology
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Proceedings Volume 9442, Optics and Measurement Conference 2014; 94420P (2015) https://doi.org/10.1117/12.2086613
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic
Abstract

We report on the results of the common collaborative project of applied research where the Institute of Scientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta - optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika.

The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology together with a design of a machine for processing and polishing of high-precision flat-surface optical components.

© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Josef Lazar, Miroslava Hola, Jan Hrabina, Jindřich Oulehla, Ondřej Číp, Miloslav Vychodil, Petra Sedlář, Milan Provazník, "Advanced interferometry systems for dimensional measurement in nanometrology", Proc. SPIE 9442, Optics and Measurement Conference 2014, 94420P (7 January 2015); doi: 10.1117/12.2086613; https://doi.org/10.1117/12.2086613
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