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7 January 2015 Gravity induced deflection of a reference plate and tested plane surfaces and its influence on optical measurement with the Fizeau interferometer
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Proceedings Volume 9442, Optics and Measurement Conference 2014; 944210 (2015) https://doi.org/10.1117/12.2083898
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic
Abstract
The paper presents an analysis of deflection of a reference plate and a tested plane parallel plate due to gravity during measurement with the Fizeau interferometer. Detailed expressions for the calculation of a deflection assuming different supports are presented. Furthermore, the relations for the calculation of a minimum thickness of a reference plate of the interferometer ensuring the required accuracy of measurement are given as well.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petr Pokorný, Antonin Miks, and Pavel Novák "Gravity induced deflection of a reference plate and tested plane surfaces and its influence on optical measurement with the Fizeau interferometer", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944210 (7 January 2015); https://doi.org/10.1117/12.2083898
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