7 January 2015 Super-polishing of Zerodur aspheres by means of conventional polishing technology
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Proceedings Volume 9442, Optics and Measurement Conference 2014; 944212 (2015) https://doi.org/10.1117/12.2175899
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic
Abstract
This paper describes a quest to find simple technique to superpolish Zerodur asphere (55μm departure from best fit sphere) that could be employed on old fashion way 1-excenter optical polishing machine. The work focuses on selection of polishing technology, study of different polishing slurries and optimization of polishing setup. It is demonstrated that either by use of fine colloidal CeO2 slurry or by use of bowl-feed polishing setup with CeO2 charged pitch we could reach 0.4nm RMS roughness while removing <30nm of surface layer. This technique, although not optimized, was successfully used to improve surface roughness on already prepolished Zerodur aspheres without necessity to involve sophisticated super-polishing technology and highly trained manpower.
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Jaroslav Polak, Jaroslav Polak, Eva Klepetková, Eva Klepetková, Josef Pošmourný, Josef Pošmourný, Miroslav Šulc, Miroslav Šulc, František Procháska, František Procháska, David Tomka, David Tomka, Ondřej Matoušek, Ondřej Matoušek, Ivana Poláková, Ivana Poláková, Eduard Šubert, Eduard Šubert, } "Super-polishing of Zerodur aspheres by means of conventional polishing technology", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944212 (7 January 2015); doi: 10.1117/12.2175899; https://doi.org/10.1117/12.2175899
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