3D form inspection of grinded optical surfaces by digital holography

Pavel Psota; Vít Lédl; Petr Vojtíšek; Roman Doleček; Václav Kopecký

doi:10.1117/12.2176005

7 January 2015 3D form inspection of grinded optical surfaces by digital holography

Pavel Psota, Vít Lédl, Petr Vojtíšek, Roman Doleček, Václav Kopecký

Proceedings Volume 9442, Optics and Measurement Conference 2014; 944218 (2015) https://doi.org/10.1117/12.2176005
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

Paper presents the method for shape measurement by digital holography based on wavelength contouring. The method employs multiple measurements from different illumination directions followed by stitching of the individual measurements by least square method. This approach is promising in measuring of steeper surface slopes more accurately

Citation Download Citation

Pavel Psota, Vít Lédl, Petr Vojtíšek, Roman Doleček, and Václav Kopecký "3D form inspection of grinded optical surfaces by digital holography", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944218 (7 January 2015); https://doi.org/10.1117/12.2176005

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