7 January 2015 3D form inspection of grinded optical surfaces by digital holography
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Proceedings Volume 9442, Optics and Measurement Conference 2014; 944218 (2015) https://doi.org/10.1117/12.2176005
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic
Abstract
Paper presents the method for shape measurement by digital holography based on wavelength contouring. The method employs multiple measurements from different illumination directions followed by stitching of the individual measurements by least square method. This approach is promising in measuring of steeper surface slopes more accurately
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Pavel Psota, Vít Lédl, Petr Vojtíšek, Roman Doleček, Václav Kopecký, "3D form inspection of grinded optical surfaces by digital holography", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944218 (7 January 2015); doi: 10.1117/12.2176005; https://doi.org/10.1117/12.2176005
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