6 March 2015 A new suspension structure of micro/nano probe
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94460N (2015) https://doi.org/10.1117/12.2176017
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
The measuring force of a micro/nano probe is an important factor affecting the probe measurement accuracy. The strength of the force largely depends on the nature of the suspension structure. How to improve the flexibility of the suspension structure is a difficult issue. To tackle the problem, this paper will put forwards an integrated suspension structure, which composed of three evenly spaced elastic hinges. Each elastic hinge has two beams, one of which is used to as the support. In measurement, the maximum displacement is occurred at the intersection of the two beams. In this paper, the flexibility of the suspension structure and probe measuring capability related to the elastic hinge's size and material are investigated based on theoretical modeling and simulation. The research result is significant to reduce the probe measuring force and improve its sensitivity.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yong Li, Yong Li, Shuai Wang, Shuai Wang, ZhaoRui Chu, ZhaoRui Chu, Jie Tang, Jie Tang, Yang Xu, Yang Xu, ZhuJun Ai, ZhuJun Ai, HongTao Wang, HongTao Wang, } "A new suspension structure of micro/nano probe", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94460N (6 March 2015); doi: 10.1117/12.2176017; https://doi.org/10.1117/12.2176017
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