Reflective off-axis point-diffraction interferometer based on Michelson architecture

Hongyi Bai; Lili Guo; Zhi Zhong; Mingguang Shan; Yabin Zhang

doi:10.1117/12.2180665

6 March 2015 Reflective off-axis point-diffraction interferometer based on Michelson architecture

Hongyi Bai, Lili Guo, Zhi Zhong, Mingguang Shan, Yabin Zhang

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94460T (2015) https://doi.org/10.1117/12.2180665
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

A reflective off-axis point-diffraction interferometer based on Michelson architecture is built to measure static and dynamic quantitative phase in a single shot. The interferometer is constructed by a beam-splitter, a pinhole mirror, a reflective mirror and two lenses to build a 4f optical system. The pinhole mirror is used as a low-pass spatial filter to generate reference wave. By tilting the reflective mirror, a small angle is created between the object beam and the reference beam to enable an off-axis interferogram. To reconstruct an interferogram with a few fringes, Kreis Fourier method is used to recovery the specimen phase. Using a plano-convex cylinder lens and an evaporative alcohol drop as the specimens, experiments are run to verify the effectiveness and robustness with this interferometer. Experimental results show that this interferometer has not only simple setup and good anti-interference performance, but also good real-time ability, which makes it suitable for dynamic phase measurement.

Citation Download Citation

Hongyi Bai, Hongyi Bai, Lili Guo, Lili Guo, Zhi Zhong, Zhi Zhong, Mingguang Shan, Mingguang Shan, Yabin Zhang, Yabin Zhang, } "Reflective off-axis point-diffraction interferometer based on Michelson architecture", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94460T (6 March 2015); doi: 10.1117/12.2180665; https://doi.org/10.1117/12.2180665

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