6 March 2015 Simulation on measurement of five-DOF motion errors of high precision spindle with cylindrical capacitive sensor
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94461L (2015) https://doi.org/10.1117/12.2180823
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
This paper describes a novel cylindrical capacitive sensor (CCS) to measure the spindle five degree-of-freedom (DOF) motion errors. The operating principle and mathematical models of the CCS are presented. Using Ansoft Maxwell software to calculate the different capacitances in different configurations, structural parameters of end face electrode are then investigated. Radial, axial and tilt motions are also simulated by making comparisons with the given displacements and the simulation values respectively. It could be found that the proposed CCS has a high accuracy for measuring radial motion error when the average eccentricity is about 15 μm. Besides, the maximum relative error of axial displacement is 1.3% when the axial motion is within [0.7, 1.3] mm, and the maximum relative error of the tilt displacement is 1.6% as rotor tilts around a single axis within [-0.6, 0.6]°. Finally, the feasibility of the CCS for measuring five DOF motion errors is verified through simulation and analysis.
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Min Zhang, Min Zhang, Wen Wang, Wen Wang, Kui Xiang, Kui Xiang, Keqing Lu, Keqing Lu, Zongwei Fan, Zongwei Fan, } "Simulation on measurement of five-DOF motion errors of high precision spindle with cylindrical capacitive sensor", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461L (6 March 2015); doi: 10.1117/12.2180823; https://doi.org/10.1117/12.2180823
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