Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb

Hanzhong Wu; Fumin Zhang; Xinghua Qu

doi:10.1117/12.2180834

6 March 2015 Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb

Hanzhong Wu, Fumin Zhang, Xinghua Qu

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94461O (2015) https://doi.org/10.1117/12.2180834
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

Wavelet transform (WT) was exploited to measure distances based on spectrum interferometry. Complex Morlet wavelet was used as the mother wavelet to obtain the amplitude graph and phase graph simultaneously, and the latter showed the wrapped phase in fact. The distances were measured numerically and experimentally, and each distance for ten times. Experimental results indicated that the distance could be obtained uniquely using wavelet transform, and the reproducibility deviation was 77.7 nm when the measured distance is about 1 mm.

Citation Download Citation

Hanzhong Wu, Fumin Zhang, and Xinghua Qu "Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461O (6 March 2015); https://doi.org/10.1117/12.2180834

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