6 March 2015 Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94461O (2015) https://doi.org/10.1117/12.2180834
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
Wavelet transform (WT) was exploited to measure distances based on spectrum interferometry. Complex Morlet wavelet was used as the mother wavelet to obtain the amplitude graph and phase graph simultaneously, and the latter showed the wrapped phase in fact. The distances were measured numerically and experimentally, and each distance for ten times. Experimental results indicated that the distance could be obtained uniquely using wavelet transform, and the reproducibility deviation was 77.7 nm when the measured distance is about 1 mm.
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Hanzhong Wu, Hanzhong Wu, Fumin Zhang, Fumin Zhang, Xinghua Qu, Xinghua Qu, } "Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461O (6 March 2015); doi: 10.1117/12.2180834; https://doi.org/10.1117/12.2180834
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