6 March 2015 Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944621 (2015) https://doi.org/10.1117/12.2180887
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology.
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Lin Chen, Lin Chen, Hongwei Jing, Hongwei Jing, Zhongwei Wei, Zhongwei Wei, Xuedong Cao, Xuedong Cao, } "Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944621 (6 March 2015); doi: 10.1117/12.2180887; https://doi.org/10.1117/12.2180887
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