6 March 2015 Signal processing for single grating displacement measurement based on 3×3 coupler
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944625 (2015) https://doi.org/10.1117/12.2180922
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
We present a compact displacement measurement system based on single grating and 3×3 coupler, possessing the capability of large range and nanometer precision. With the introduction of 3×3 coupler for phase shift in interference signal, the present scheme has the advantages of simple structure, convenient alignment, and insensitivity to air turbulence, resulting in high robustness. We accordingly developed an efficient and precision signal processing method for phase demodulation on a digital signal processing, adapting to characteristics of outputs in 3×3 coupler, achieving a high-powered subdivision of the interference phase. It was validated that the phase precision was about 1° even when phase and amplitude errors were added to interference signals in the simulation, which corresponded to a displacement precision of about 3nm.
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Chunhua Wei, Chunhua Wei, Shuhua Yan, Shuhua Yan, Cunbao Lin, Cunbao Lin, Guochao Wang, Guochao Wang, } "Signal processing for single grating displacement measurement based on 3×3 coupler", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944625 (6 March 2015); doi: 10.1117/12.2180922; https://doi.org/10.1117/12.2180922
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