6 March 2015 Error mechanism analyses of an ultra-precision stage for high speed scan motion over a large stroke
Author Affiliations +
Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94462Q (2015) https://doi.org/10.1117/12.2181186
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
Reticle Stage (RS) is designed to complete scan motion with high speed in nanometer-scale over a large stroke. Comparing with the allowable scan accuracy of a few nanometers, errors caused by any internal or external disturbances are critical and must not be ignored. In this paper, RS is firstly introduced in aspects of mechanical structure, forms of motion, and controlling method. Based on that, mechanisms of disturbances transferred to final servo-related error in scan direction are analyzed, including feedforward error, coupling between the large stroke stage (LS) and the short stroke stage (SS), and movement of measurement reference. Especially, different forms of coupling between SS and LS are discussed in detail. After theoretical analysis above, the contributions of these disturbances to final error are simulated numerically. The residual positioning error caused by feedforward error in acceleration process is about 2 nm after settling time, the coupling between SS and LS about 2.19 nm, and the movements of MF about 0.6 nm.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shaokai Wang, Shaokai Wang, Jiubin Tan, Jiubin Tan, Jiwen Cui, Jiwen Cui, } "Error mechanism analyses of an ultra-precision stage for high speed scan motion over a large stroke", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462Q (6 March 2015); doi: 10.1117/12.2181186; https://doi.org/10.1117/12.2181186
PROCEEDINGS
9 PAGES


SHARE
Back to Top