6 March 2015 A voice coil motor based measuring force control system for tactile scanning profiler
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463B (2015) https://doi.org/10.1117/12.2181350
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
In tactile scanning profiler, the measuring force would change in a wide range when it was used for profile measurement in a large range, which could possibly destroy the measured surface. To solve the problem, measuring force control system for tactile scanning profiler was needed. In the paper, a voice coil motor-based measuring force control system for tactile scanning profiler was designed. In the design, a low stiffness coefficient spring was used to provide contact force, while a voice coil motor (VCM) to balance the spring force so that the contact force could be kept for constant measuring force. A VCM was designed specially, and for active measuring force control, a precision current source circuit under the control of a DSP unit was designed to drive the VCM. The performance of voice coil motor based measuring force control system had been tested, and its good characteristics were verified.
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Shengdong Feng, Shengdong Feng, Xiaojun Liu, Xiaojun Liu, Liangzhou Chen, Liangzhou Chen, Liping Zhou, Liping Zhou, Wenlong Lu, Wenlong Lu, } "A voice coil motor based measuring force control system for tactile scanning profiler", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463B (6 March 2015); doi: 10.1117/12.2181350; https://doi.org/10.1117/12.2181350
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