6 March 2015 A vertical scanning positioning system with large range and nanometer resolution for optical profiler
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463C (2015) https://doi.org/10.1117/12.2181351
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
Piezoelectric ceramics with a flexible hinge guide was used for fine positioning at nanometer level, while a stepping motor was used for coarse positioning with a resolution at micrometer level, and their combination helped fulfillment of vertical scanning positioning with large range and nanometer resolution. A grating sensor was used for the real-time measurement of scanning displacement for close-loop positioning control. The properties of the flexible hinge guide was analyzed using ANSYS. Experimental results indicated the performance of the system was good. The system had a good application prospect in an optical profiler for surface measurement.
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Qian Li, Qian Li, Xiaojun Liu, Xiaojun Liu, Zili Lei, Zili Lei, Yi Zheng, Yi Zheng, Liangzhou Chen, Liangzhou Chen, Wenlong Lu, Wenlong Lu, } "A vertical scanning positioning system with large range and nanometer resolution for optical profiler", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463C (6 March 2015); doi: 10.1117/12.2181351; https://doi.org/10.1117/12.2181351
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