Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials

Weihong Song; Xi Hou; Fan Wu; Shibin Wu; Hongwei Jing

doi:10.1117/12.2181363

6 March 2015 Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials

Weihong Song, Xi Hou, Fan Wu, Shibin Wu, Hongwei Jing

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463F (2015) https://doi.org/10.1117/12.2181363
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

Absolute testing methods have been widely employed in the accurate metrology of optical surface deviation. As a general method, the shift-rotation method requires several rotations and translations of the surface under test. And the surface deviation of the reference and the surface under test can be both calculated in terms of Zernike polynomials. The validity of the shift and rotation procedure was proved through experiments. Two different transmission spheres (with the same F number but different quality of the reference surfaces) were used to test the same spherical surface under test. The test results of the spherical surface under test are in good agreement.

Citation Download Citation

Weihong Song, Xi Hou, Fan Wu, Shibin Wu, and Hongwei Jing "Experimental study on absolute measurement of spherical surfaces with shift-rotation method based on Zernike polynomials", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463F (6 March 2015); https://doi.org/10.1117/12.2181363

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