Equivalent common path method in large-scale laser comparator

Mingzhao He; Jianshuang Li; Dongjing Miao

doi:10.1117/12.2181536

6 March 2015 Equivalent common path method in large-scale laser comparator

Mingzhao He, Jianshuang Li, Dongjing Miao

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463Y (2015) https://doi.org/10.1117/12.2181536
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

Large-scale laser comparator is main standard device that providing accurate, reliable and traceable measurements for high precision large-scale line and 3D measurement instruments. It mainly composed of guide rail, motion control system, environmental parameters monitoring system and displacement measurement system. In the laser comparator, the main error sources are temperature distribution, straightness of guide rail and pitch and yaw of measuring carriage. To minimize the measurement uncertainty, an equivalent common optical path scheme is proposed and implemented. Three laser interferometers are adjusted to parallel with the guide rail. The displacement in an arbitrary virtual optical path is calculated using three displacements without the knowledge of carriage orientations at start and end positions. The orientation of air floating carriage is calculated with displacements of three optical path and position of three retroreflectors which are precisely measured by Laser Tracker. A 4th laser interferometer is used in the virtual optical path as reference to verify this compensation method. This paper analyzes the effect of rail straightness on the displacement measurement. The proposed method, through experimental verification, can improve the measurement uncertainty of large-scale laser comparator.

Citation Download Citation

Mingzhao He, Jianshuang Li, and Dongjing Miao "Equivalent common path method in large-scale laser comparator", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463Y (6 March 2015); https://doi.org/10.1117/12.2181536

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