6 March 2015 Effects of dynamic characters of the macro-micro fast coupling system in long stroke system
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944641 (2015) https://doi.org/10.1117/12.2181599
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
Macro-micro fast coupling system of dual-stage is used for the detachment and coupling of the macro-motion system and the wafer-stage. When the macro-motion system couples with the wafer-stage, the wafer-stage is driven by macro-motor to achieve long stroke motion. In this paper, the bottom air bearings of wafer stage are analyzed when the driving force of macro motor shifts the center of mass of wafer stage in Z direction. The X, Y, Z stiffness of the coupling system are obtained by using ANSYS.
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Jianwei Wu, Jianwei Wu, Yong Yuan, Yong Yuan, Jiwen Cui, Jiwen Cui, } "Effects of dynamic characters of the macro-micro fast coupling system in long stroke system", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944641 (6 March 2015); doi: 10.1117/12.2181599; https://doi.org/10.1117/12.2181599
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