A displacement measuring system based on grating double diffraction

Bo Zhao; Lei Wang; Min-er Xu; Hong Zhao; Xiang-dong Liu

doi:10.1117/12.2182024

6 March 2015 A displacement measuring system based on grating double diffraction

Bo Zhao, Lei Wang, Min-er Xu, Hong Zhao, Xiang-dong Liu

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94464J (2015) https://doi.org/10.1117/12.2182024
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

A displacement measuring system based on grating double diffraction is proposed in this paper to eliminate the impact of multiple reflections of the zero-order diffraction beam and to reduce the stray light coming from the interference field. The principle of the proposed system is that with the proper interference of the first order beam of second diffraction, a displacement transducer can be obtained via the Doppler frequency shift and phase decoding. Simulation tests are conducted using LightTools model to prove the effectiveness of the proposed system. And experiment results shows that a resolution of 20 nm can be achieved over a range of 25 mm. It is therefore concluded that the proposed system can be used to improve the measurement resolution and accuracy.

Citation Download Citation

Bo Zhao, Lei Wang, Min-er Xu, Hong Zhao, and Xiang-dong Liu "A displacement measuring system based on grating double diffraction", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464J (6 March 2015); https://doi.org/10.1117/12.2182024

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