6 March 2015 Absolute distance measurement using frequency-comb-referenced four-wavelength interferometry
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94464N (2015) https://doi.org/10.1117/12.2182140
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
We measure absolute distances by performing multi-wavelength interferometry (MWI) using four different wavelengths generated simultaneously from the frequency comb of a femtosecond laser. The measurement precision is estimated to be less than 63 nm in peak-to-valley over a distance of 1 m as compared to an incremental HeNe laser interferometer. We also evaluate the operational stability and robustness of the interferometer hardware system over a time period of 12 hours. Finally, it is concluded that the proposed frequency-comb-referenced multi-wavelength interferometry is capable of providing fast, precise and high stable absolute distance measurements, being well suited for industrial precisionengineering applications and near-future space missions.
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Guochao Wang, Guochao Wang, Yoon-Soo Jang, Yoon-Soo Jang, Hyunjay Kang, Hyunjay Kang, Byung Jae Chun, Byung Jae Chun, Young-Jin Kim, Young-Jin Kim, Seung-Woo Kim, Seung-Woo Kim, } "Absolute distance measurement using frequency-comb-referenced four-wavelength interferometry", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464N (6 March 2015); doi: 10.1117/12.2182140; https://doi.org/10.1117/12.2182140
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