6 March 2015 An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94464U (2015) https://doi.org/10.1117/12.2182382
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
Lithography machine is a high-precision manufacturing equipment of electromechanical integration, involving precision machinery, precision control and measure, precision measurement and other subjects. PSO algorithm is easy to fall into local optimum, which has simple concepts and fast convergence. This paper proposes an improved PSO algorithm with adaptive parameters and boundary constraint, in ensuring accuracy of the algorithm optimization and fast convergence. Simulation results show that the methods have good applicability and stability for coarse-stage in lithpgraphy machine.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yang Liu, Yang Liu, Fazhi Liu, Fazhi Liu, Kai Wei, Kai Wei, Zhenxian Fu, Zhenxian Fu, } "An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464U (6 March 2015); doi: 10.1117/12.2182382; https://doi.org/10.1117/12.2182382
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