6 March 2015 Research on PID controller with input shaping algorithm for linear motor
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94464W (2015) https://doi.org/10.1117/12.2182387
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
The reticle stage of lithography is a high precision servo motion platform, which requires using macro movement of linear motor and micro movement of voice coil motor to realize an nm-level positioning precision and tracking. In order to increase the control effect and response speed of macro movement linear motor of reticle stage of lithography, the paper presents an efficient control for linear motor. The method use input shaping technique with Proportional Integral Derivative (PID) controller to realize the high position precision in small stetting time. In the paper we firstly build the linear motor mathematical modeling which is end to velocity loop or position loop. so that we mainly focus on the tracking of speed signal. Then a PID controller is introduced in the system, which is high frequency used in industrial control. Finally, as the need of high positioning precision and small stetting time, we apply input shaping algorithm to solve the problem. The simulation of the system is performed by using MATLAB/Simulation. The evaluation of the method is the performance of input tracking capability.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yang Liu, Yang Liu, Yue Dong, Yue Dong, Wenchao Fan, Wenchao Fan, Zhenxian Fu, Zhenxian Fu, } "Research on PID controller with input shaping algorithm for linear motor", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94464W (6 March 2015); doi: 10.1117/12.2182387; https://doi.org/10.1117/12.2182387
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