6 March 2015 Research and development of novel wireless digital capacitive displacement sensor
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Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 944659 (2015) https://doi.org/10.1117/12.2183158
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China
Abstract
In order to solve the problem of noncontact, wireless and nonmagnetic displacement sensing with nanometer resolution within critical limited space for ultraprecision displacement monitoring in the Joule balance device, a novel wireless digital capacitive displacement sensor (WDCDS) is proposed. The WDCDS is fabricated with brass and other nonmagnetic material and powered with a small battery inside, a small integrated circuit is assembled inside for converting and processing of capacitive signal, and low power Bluetooth is used for wireless signal transmission and communication. Experimental results show that the WDCDS proposed has a resolution of better than 1nm and a nonlinearity of 0.077%, therefore it is a delicate design for ultraprecision noncontact displacement monitoring in the Joule balance device, meeting the demand for properties of wireless, nonmagnetic and miniaturized size.
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Junning Cui, Junning Cui, Zhangqiang He, Zhangqiang He, Tao Sun, Tao Sun, Xingyuan Bian, Xingyuan Bian, Lu Han, Lu Han, } "Research and development of novel wireless digital capacitive displacement sensor", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944659 (6 March 2015); doi: 10.1117/12.2183158; https://doi.org/10.1117/12.2183158
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