Automatic stitching interferometry for large plano optics

Ang Liu; Bo Gao; Kaiyuan Xu; Yuhang He; Qiang Li; Liqun Chai

doi:10.1117/12.2075830

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19 February 2015 Automatic stitching interferometry for large plano optics

Ang Liu, Bo Gao, Kaiyuan Xu, Yuhang He, Qiang Li, Liqun Chai

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Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 94492T (2015) https://doi.org/10.1117/12.2075830
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China

Abstract

The paper will describe an automated subaperture stitching interferometry for large plano surface based on relevant algorithm, which restruct the whole surface without recording the position of every subaperture. Both correction and data fusion algorithm are used to minimize the stitching error.

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Ang Liu, Bo Gao, Kaiyuan Xu, Yuhang He, Qiang Li, and Liqun Chai "Automatic stitching interferometry for large plano optics", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94492T (19 February 2015); https://doi.org/10.1117/12.2075830

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