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19 February 2015Automatic stitching interferometry for large plano optics
The paper will describe an automated subaperture stitching interferometry for large plano surface based on relevant algorithm, which restruct the whole surface without recording the position of every subaperture. Both correction and data fusion algorithm are used to minimize the stitching error.
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Ang Liu, Bo Gao, Kaiyuan Xu, Yuhang He, Qiang Li, Liqun Chai, "Automatic stitching interferometry for large plano optics," Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94492T (19 February 2015); https://doi.org/10.1117/12.2075830