Experimental research of error restraint for dynamic interferometer in optical testing

Xin Wu; Xiaoqiang Zhang; Xiaoyan Wu; Linna Zhang; Yingjie Yu

doi:10.1117/12.2075866

19 February 2015 Experimental research of error restraint for dynamic interferometer in optical testing

Xin Wu, Xiaoqiang Zhang, Xiaoyan Wu, Linna Zhang, Yingjie Yu

Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 94492V (2015) https://doi.org/10.1117/12.2075866
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China

Abstract

Phase shifting interferometry is commonly used in precision optical surface measurement, but which possesses some limitation because of the sensitivity to environment. Therefore, it is hardly used in optical testing in the workshop environment. Thus, the instantaneous interferometry is a good choice because of the insensitive to vibration. This paper will describe an instantaneous interferometry utilizing spatial carrier and Fourier transform, and discuss the accuracy of the interferometer for optical testing when phase-shifting interferometry is unable to realize the precision measurement. With a lot of experiments, some problems were analyzed, including the relationships between the measurement accuracy and systematic error, vibration, temperature, the test surface cleanliness and so on. The discussed work of error restraint can provide a reference for the instantaneous interferometry applications.

Citation Download Citation

Xin Wu, Xiaoqiang Zhang, Xiaoyan Wu, Linna Zhang, and Yingjie Yu "Experimental research of error restraint for dynamic interferometer in optical testing", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94492V (19 February 2015); https://doi.org/10.1117/12.2075866

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