19 February 2015 High-precision radius automatic measurement using laser differential confocal technology
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Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 944935 (2015) https://doi.org/10.1117/12.2081341
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China
Abstract
A high precision radius automatic measurement method using laser differential confocal technology is proposed. Based on the property of an axial intensity curve that the null point precisely corresponds to the focus of the objective and the bipolar property, the method uses the composite PID (proportional-integral-derivative) control to ensure the steady movement of the motor for process of quick-trigger scanning, and uses least-squares linear fitting to obtain the position of the cat-eye and confocal positions, then calculates the radius of curvature of lens. By setting the number of measure times, precision auto-repeat measurement of the radius of curvature is achieved. The experiment indicates that the method has the measurement accuracy of better than 2 ppm, and the measuring repeatability is better than 0.05 μm. In comparison with the existing manual-single measurement, this method has a high measurement precision, a strong environment anti-interference capability, a better measuring repeatability which is only tenth of former’s.
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Hongwei Jiang, Weiqian Zhao, Jiamiao Yang, Yongkui Guo, Yang Xiao, "High-precision radius automatic measurement using laser differential confocal technology", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 944935 (19 February 2015); doi: 10.1117/12.2081341; https://doi.org/10.1117/12.2081341
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