Laser Processing Of Semiconductors - A Production Machine

Leslie L. Burns; Arthur R. Elsea

doi:10.1117/12.947396

16 August 1988 Laser Processing Of Semiconductors - A Production Machine

Leslie L. Burns, Arthur R. Elsea

Proceedings Volume 0945, Advanced Processing of Semiconductor Devices II; (1988) https://doi.org/10.1117/12.947396
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

Laser processing of semiconductors offers the promise of fast turn around of custom chips. Already lasers are used for mask repair and as a heat source for some thermal processes at the wafer level. This paper describes the development of a machine for the purpose of customizing gate arrays by using a laser as a point source of heat to cause various thermal reactions at the semiconductor surface.

Citation Download Citation

Leslie L. Burns and Arthur R. Elsea "Laser Processing Of Semiconductors - A Production Machine", Proc. SPIE 0945, Advanced Processing of Semiconductor Devices II, (16 August 1988); https://doi.org/10.1117/12.947396

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