Active angular alignment of gauge block in double-ended interferometer for its calibration

Zdenĕk Buchta; Martin Šarbort; Šimon Řeřucha; Václav Hucl; Martin Čížek; Josef Lazar; Ondřej Číp

doi:10.1117/12.2070514

6 January 2015 Active angular alignment of gauge block in double-ended interferometer for its calibration

Zdenĕk Buchta, Martin Šarbort, Šimon Řeřucha, Václav Hucl, Martin Čížek, Josef Lazar, Ondřej Číp

Proceedings Volume 9450, Photonics, Devices, and Systems VI; 94500H (2015) https://doi.org/10.1117/12.2070514
Event: Photonics Prague 2014, 2014, Prague, Czech Republic

Abstract

This paper presents a method for active angular alignment of gauge block implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement.

Citation Download Citation

Zdenĕk Buchta, Martin Šarbort, Šimon Řeřucha, Václav Hucl, Martin Čížek, Josef Lazar, and Ondřej Číp "Active angular alignment of gauge block in double-ended interferometer for its calibration", Proc. SPIE 9450, Photonics, Devices, and Systems VI, 94500H (6 January 2015); https://doi.org/10.1117/12.2070514

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available