Burying of channel optical waveguides: relation between near-field measurement and Ag concentration profile

Wan-Shao Tsai; Yen-Huang Liu; Ondrej Barkman; Vaclav Prajzler; Stanislav Stanek; Pavla Nekvindova

doi:10.1117/12.2070307

6 January 2015 Burying of channel optical waveguides: relation between near-field measurement and Ag concentration profile

Wan-Shao Tsai, Yen-Huang Liu, Ondrej Barkman, Vaclav Prajzler, Stanislav Stanek, Pavla Nekvindova

Author Affiliations +

Proceedings Volume 9450, Photonics, Devices, and Systems VI; 945015 (2015) https://doi.org/10.1117/12.2070307
Event: Photonics Prague 2014, 2014, Prague, Czech Republic

Abstract

Two-step field-assisted ion-exchanged waveguides have been fabricated on a glass substrate. The concentration profiles of the exchanged ions were measured with electron microprobe. The waveguides were characterized under scanning electron microscope and optical microscope for the investigation of burying structures. Guiding mode patterns were characterized with near-field measurement, where symmetric profiles were observed for the burying-type waveguide. The refractive index profiles were also measured with a modified end-fire coupling method. The relation between ion concentration profiles and index profiles were compared for the waveguides with different fabrication process.

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Wan-Shao Tsai, Yen-Huang Liu, Ondrej Barkman, Vaclav Prajzler, Stanislav Stanek, and Pavla Nekvindova "Burying of channel optical waveguides: relation between near-field measurement and Ag concentration profile", Proc. SPIE 9450, Photonics, Devices, and Systems VI, 945015 (6 January 2015); https://doi.org/10.1117/12.2070307

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