8 June 2015 Enhanced performance of VOx-based bolometer using patterned gold black absorber
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Abstract
Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black’s near unity absorption. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.
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Evan M. Smith, Deep Panjwani, James Ginn, Andrew Warren, Christopher Long, Pedro Figuieredo, Christian Smith, Joshua Perlstein, Nick Walter, Carol Hirschmugl, Robert E. Peale, David J. Shelton, "Enhanced performance of VOx-based bolometer using patterned gold black absorber", Proc. SPIE 9451, Infrared Technology and Applications XLI, 94511I (8 June 2015); doi: 10.1117/12.2177401; https://doi.org/10.1117/12.2177401
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