Enhanced performance of VO<sub>x</sub>-based bolometer using patterned gold black absorber

Evan M. Smith; Deep Panjwani; James Ginn; Andrew Warren; Christopher Long; Pedro Figuieredo; Christian Smith; Joshua Perlstein; Nick Walter; Carol Hirschmugl; Robert E. Peale; David J. Shelton

doi:10.1117/12.2177401

8 June 2015 Enhanced performance of VO_x-based bolometer using patterned gold black absorber

Evan M. Smith; Deep Panjwani; James Ginn; Andrew Warren; Christopher Long; Pedro Figuieredo; Christian Smith; Joshua Perlstein; Nick Walter; Carol Hirschmugl; Robert E. Peale; David J. Shelton;

Author Affiliations +

Proceedings Volume 9451, Infrared Technology and Applications XLI; 94511I (2015) https://doi.org/10.1117/12.2177401
Event: SPIE Defense + Security, 2015, Baltimore, Maryland, United States

Abstract

Patterned highly absorbing gold black film has been selectively deposited on the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves gold black’s near unity absorption. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. Infrared responsivity is substantially improved by the gold black coating without significantly increasing noise. The increase in the time constant caused by the additional mass of gold black is a modest 14%.

Citation Download Citation

Evan M. Smith, Deep Panjwani, James Ginn, Andrew Warren, Christopher Long, Pedro Figuieredo, Christian Smith, Joshua Perlstein, Nick Walter, Carol Hirschmugl, Robert E. Peale, David J. Shelton, "Enhanced performance of VO_x-based bolometer using patterned gold black absorber", Proc. SPIE 9451, Infrared Technology and Applications XLI, 94511I (8 June 2015); doi: 10.1117/12.2177401; https://doi.org/10.1117/12.2177401

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years