8 June 2015 Three-dimensional plasmonic metamaterial absorbers based on all-metal structures
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Three-dimensional plasmonic metamaterial absorbers (3-D PMAs) based on all-metal structures were developed. 3-D PMAs consist of a periodic array of thin metal micropatches connected to a thin metal plate with narrow metal posts. The 3-D PMA consists of plasmonic metal (Au) based components. 3-D PMAs were fabricated by a two-step lift-off procedure with a carbon sacrifice layer and a narrow metal post with a height of 200 nm was achieved. Reflection spectroscopy measurements demonstrate that the wavelength-selective absorption was realized, and the absorption wavelength can be controlled by the micropatch size, regardless of the micropatch-array period, and can be longer than the micropatch array period. Wavelength selective absorption is possible due to the surface plasmonic resonant mode localized at the micropatches. The metal posts have negligible impact on the plasmonic resonance. 3-D PMAs based on all-metal structures can be applicable for a wide range of the middle- and long-wavelength IR region due to the lack of additional absorption by an insulator layer based on SiO2, SiN, or Al2O3, which are typically used in metal-insulatormetal absorbers. 3-D PMAs have a small thermal mass and an absorption wavelength beyond the period, which result in a fast response and small pixel size. The results obtained here should contribute to the high-performance wavelengthselective uncooled IR sensors and IR emitters.
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Shinpei Ogawa, Shinpei Ogawa, Daisuke Fujisawa, Daisuke Fujisawa, Masafumi Kimata, Masafumi Kimata, "Three-dimensional plasmonic metamaterial absorbers based on all-metal structures", Proc. SPIE 9451, Infrared Technology and Applications XLI, 94511J (8 June 2015); doi: 10.1117/12.2176550; https://doi.org/10.1117/12.2176550

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