Synthesis of two-dimensional materials for beyond graphene devices

Kehao Zhang; Sarah Eichfeld; Jacob Leach; Bob Metzger; Yu-Chuan Lin; Keith Evans; Joshua A. Robinson

doi:10.1117/12.2177985

22 May 2015 Synthesis of two-dimensional materials for beyond graphene devices

Kehao Zhang, Sarah Eichfeld, Jacob Leach, Bob Metzger, Yu-Chuan Lin, Keith Evans, Joshua A. Robinson

Proceedings Volume 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII; 94670O (2015) https://doi.org/10.1117/12.2177985
Event: SPIE Defense + Security, 2015, Baltimore, MD, United States

Abstract

In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS₂ and WSe₂, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS₂ through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe₂ via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.

Citation Download Citation

Kehao Zhang, Sarah Eichfeld, Jacob Leach, Bob Metzger, Yu-Chuan Lin, Keith Evans, and Joshua A. Robinson "Synthesis of two-dimensional materials for beyond graphene devices", Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94670O (22 May 2015); https://doi.org/10.1117/12.2177985

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