22 May 2015 Synthesis of two-dimensional materials for beyond graphene devices
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In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.
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Kehao Zhang, Kehao Zhang, Sarah Eichfeld, Sarah Eichfeld, Jacob Leach, Jacob Leach, Bob Metzger, Bob Metzger, Yu-Chuan Lin, Yu-Chuan Lin, Keith Evans, Keith Evans, Joshua A. Robinson, Joshua A. Robinson, "Synthesis of two-dimensional materials for beyond graphene devices", Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94670O (22 May 2015); doi: 10.1117/12.2177985; https://doi.org/10.1117/12.2177985

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