22 May 2015 A bimorph electrothermal actuator for micromirror devices
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The research and development results along the characteristics of the micro-mirror element driven by thermal microactuator are presented. This work shows that for calculating micro-mirror element deflection is crucial for consideration the temperature distribution along the length of the micromirror element. The calculation of the superheat temperature is provided, along with the effective overheat temperature. Provided calculations are in good correlation with experimental data.
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Sergey S. Evstafyev, Sergey S. Evstafyev, Sergey P. Timoshenkov, Sergey P. Timoshenkov, Igor M. Britkov, Igor M. Britkov, Vyacheslav K. Samoilykov, Vyacheslav K. Samoilykov, Anatolij M. Tereshhenko, Anatolij M. Tereshhenko, "A bimorph electrothermal actuator for micromirror devices", Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94672X (22 May 2015); doi: 10.1117/12.2176817; https://doi.org/10.1117/12.2176817

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