Paper
23 August 1988 Laser Evaporation Deposition And Interaction With Superconducting Thin Films
H. S. Kwok, D. T. Shaw
Author Affiliations +
Proceedings Volume 0948, High-Tc Superconductivity: Thin Films and Devices; (1988) https://doi.org/10.1117/12.947474
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States
Abstract
We describe here the deposition of superconducting thin films by the laser evaporation technique. The characterization of this process, and optimization with respect to wavelength and pulse duration of the laser will be discussed. Results of laser interaction experiments will also be described. It was shown that the superconducting thin films could be used as room temperature bolometers with a microsecond response time.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. S. Kwok and D. T. Shaw "Laser Evaporation Deposition And Interaction With Superconducting Thin Films", Proc. SPIE 0948, High-Tc Superconductivity: Thin Films and Devices, (23 August 1988); https://doi.org/10.1117/12.947474
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KEYWORDS
Thin films

Superconductors

Excimer lasers

Nd:YAG lasers

Continuous wave operation

Thin film devices

Pulsed laser operation

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