13 May 2015 Fiber optic anemometer based on silicon Fabry-Pérot interferometer
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Flowmeters have been finding vast applications in all kinds of industrial processes, such as process control, food quality surveillance, wind turbines, environment monitoring, etc. In this paper, we propose a new anemometer which consists of a Fabry-Pérot interferometer (FPI) implemented using a thin silicon mounted on the tip of an optical fiber. The anemometer takes advantage of the superior thermal and optical properties of silicon. Silicon is transparent to infrared wavelength, while it absorbs visible light. Thus, the silicon FPI can be heated by a beam injected from a red diode laser while the infrared signals go through it without any interference from the heating light. The heat loss from the silicon film will increase when the sensor is placed in stronger flow (wind), which induces a decrease in the optical path of the silicon FPI, which lead to blueshifts the output spectrum. A higher wind speed corresponds to a larger wavelength shift. By tuning the heating power, the response range and sensitivity of the anemometer is changed. Experimental results demonstrate that a wavelength shift -0.574 nm was observed for a wind speed of 4 m/s. Better sensitivity is to be expected when stronger heating applied. The proposed sensor also features simple structure, low cost and fast response.
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Guigen Liu, Guigen Liu, Weilin Hou, Weilin Hou, Wei Qiao, Wei Qiao, Ming Han, Ming Han, } "Fiber optic anemometer based on silicon Fabry-Pérot interferometer", Proc. SPIE 9480, Fiber Optic Sensors and Applications XII, 94800A (13 May 2015); doi: 10.1117/12.2180258; https://doi.org/10.1117/12.2180258


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