13 May 2015 Microfluidics for spectrochemical applications
Author Affiliations +
For three decades or so, microfluidics continued to receive attention. This increasing interest is primarily driven by applications. Example applications range from sensors and actuators, to Micro Electro Mechanical Systems, biotechnology and chemistry. In our laboratory, we have been developing microfluidics primarily for spectrochemical applications, for example, for fabrication of postage stamp size microplasma devices and for sample preparation and processing. The main focus of this paper is to describe fabrication technology developed in our laboratories for fabrication of microfluidics on (relatively expensive) crystalline Silicon wafers and on inexpensive glass chips.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Shatford, R. Shatford, D. Kim, D. Kim, Vassili Karanassios, Vassili Karanassios, "Microfluidics for spectrochemical applications", Proc. SPIE 9486, Advanced Environmental, Chemical, and Biological Sensing Technologies XII, 94860N (13 May 2015); doi: 10.1117/12.2177513; https://doi.org/10.1117/12.2177513

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