18 May 2015 Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors
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Abstract
The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures.
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Richa Agrawal, Richa Agrawal, Majid Beidaghi, Majid Beidaghi, Wei Chen, Wei Chen, Chunlei Wang, Chunlei Wang, } "Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors", Proc. SPIE 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI, 94930C (18 May 2015); doi: 10.1117/12.2180122; https://doi.org/10.1117/12.2180122
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