18 June 2015 Untethered microscale flight: mechanisms and platforms for future aerial MEMS microrobots
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This paper describes initial work on untethered microscale flying structures as a platform for new class of aerial MEMS microrobots. We present and analyze both biomimetic structures based partially on wing designs of smallest flying insects on Earth, as well as stress-engineered structures powered by radiometric (thermal) forces. The latter devices, also called MEMS Microfliers are 300 μm × 300 μm × 1.5 μm in size, and are fabricated out of polycrystalline silicon. A convex chassis, formed through a novel in-situ masked post-release stress-engineering process, ensures their static inflight stability. High-speed optical micrography was used to image these MEMS microfliers in mid-flight, analyzing their flight profile.
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Syed A. Hussain, Syed A. Hussain, Spencer Ward, Spencer Ward, Omid Mahdavipour, Omid Mahdavipour, Ratul Majumdar, Ratul Majumdar, Igor Paprotny, Igor Paprotny, } "Untethered microscale flight: mechanisms and platforms for future aerial MEMS microrobots", Proc. SPIE 9494, Next-Generation Robotics II; and Machine Intelligence and Bio-inspired Computation: Theory and Applications IX, 94940F (18 June 2015); doi: 10.1117/12.2190851; https://doi.org/10.1117/12.2190851

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