5 May 2015 PDMS based micro-optics and microchannels for lab-on-a-chip application
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Abstract
We describe new technologies for a fabrication of microfluidics and micro-optics components for lab-on-a-chip applications based on polydimethylsiloxane. We use combination of direct laser writing (DLW) lithography for channel patterning in photoresist layer with PDMS imprinting process. Unique imprinting and optical properties favors PDMS for fabrication of different microchannels and microlens arrays. This technology allows the fabrication of different PDMS channel structures. Also PDMS based microlens arrays were patterned in photoresist layer by DLW process and also by interference lithography and imprinted in PDMS layer. Spontaneous microlens array based on polystyrene microspheres was also prepared by spin-coating of dispersed microspheres in photoresist and for organized microlens array we used predefined two-dimensional grid prepared by interference lithography. Final structures were investigated by confocal and optical microscope. The prepared PDMS and polystyrene based microdevices can be used in lab-on-a-chip applications in sensing and biological measurements.
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M. Pardelova, M. Pardelova, D. Pudiš, D. Pudiš, D. Jandura, D. Jandura, P. Gaso, P. Gaso, } "PDMS based micro-optics and microchannels for lab-on-a-chip application", Proc. SPIE 9506, Optical Sensors 2015, 95061E (5 May 2015); doi: 10.1117/12.2181945; https://doi.org/10.1117/12.2181945
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